On the Near-Field Shaping and Focusing Capability of a Radial ... the slots of the antenna. The spillover efficiency is maximiz ed during the design process. The antenna is centrally fed by a simple coaxial probe. The antenna design is validated by a prototype and measurements at 12.5 GHz. Index Terms—Near field, focusing, radial line slot array, RLSA, near-field shaping. I. INTRODUCTION Microwave power coupling in a surface wave excited plasma density plasma can form with an ion sheath layer along the antenna. Then the microwave was fed into the coaxial wave-guide from the right side of the system. Now the input microwave power could propagate easily along the negative biased antenna and surface wave excited plasma generated along the antenna inside the chamber.
Radial Line Slot Array Antenna Feeder Design Using…
Abstract: The plasma reactor with radial line slot antenna (RLSATM), a planar microwave (2.45 GHz) plasma source, is used in etch and deposition technology, typically in reactive rich gaseous environment, and for processes that are sensitive to plasma damage. Besides a strict uniformity control, the plasma chemistry is Radial Line Slot Antennas - Home - Springer Radial Line Slot Antennas Hiroyuki Arai* Yokohama National University, Yokohama, Kanagawa, Japan Abstract This chapter presents the development history of radial line slot antenna. The antennas are used for circular polarized high-gain antenna in microwave and millimeter wave bands. Linearly polarized arrays Impact of static magnetic fields on the radial line slot ... The radial line slot antenna plasma source is used in semiconductor device fabrication. As is the case for all plasma sources, ever more strict uniformity control requirements are driven by the precision demands of new device technologies. Radial Line Slot Antennas | Request PDF A radial line slot antenna (RLSA) is a nonresonant multimode waveguide slotted array. To improve the power handing capacity, we design a radial line slow wave structure which replaces a ...
A traditional radial line slot antenna (RLSA) is a high gain planar array. To improve the power handling capacity, we design a radial line slow wave structure whichThis high power microwave (HPM) RLSA is fed from a double-layered radial line waveguide to realize the directional radiation of the microwave.
Radial Line Slot Antenna - Chiba U
The frequency of the RF source can be feedback controlled to compensate for changes in the edge plasma conditions, or fast variable tuning elements in the transmission line between the generator output and the antenna input connections can …
Simulations of the Plasma Structure of a Radial Line ... The Radial Line Slot Antenna (RLSA) plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature. Radial line slot antenna having a conductive layer - Tokyo ... The plasma source 130 comprises a surface wave plasma (SWP) source, such as a radial line slot antenna (RLSA), to be discussed below. As seen in FIG. 1A, the plasma processing system 100 comprises a gas supply system 135 coupled to the processing chamber 110 and configured to introduce a process gas to process space 115. During dry plasma ... US20160293389A1 - Dipole ring magnet assisted microwave ...
The Japan Society of Applied Physics (JSAP) serves as an academic interface between science and engineering and an interactive platform for academia and the industry. JSAP is a "conduit" for the transfer of fundamental concepts to the industry for development and technological applications. JSAP was ...
TM CVD Processes in Ar+H2+SiH4+C2H6 and Dopant Gas Abstract: The plasma reactor with radial line slot antenna (RLSATM), a planar microwave (2.45 GHz) plasma source, is used in etch and deposition technology, typically in reactive rich gaseous environment, and for processes that are sensitive to plasma damage. Besides a strict uniformity control, the plasma chemistry is Radial Line Slot Antenna - Chiba U A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA is almost negligible. A single-layered RLSA (SL-RLSA) has the simplest structure. Radial Line Slot Antenna - Chiba U A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA is almost negligible. A single-layered RLSA (SL-RLSA) has the simplest structure.
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